N.I Chkhalo: search on Z-Library

The world's largest scientific articles store. 70,000,000+ articles for free.

Don't use scam websites

1

Atomic-hydrogen cleaning of Sn from Mo/Si and DLC/Si extreme ultraviolet multilayer mirrors

Soer, Wouter A., van Herpen, Maarten M. J. W., Jak, Martin J. J., Gawlitza, Peter, Braun, Stefan, Salashchenko, Nikolay N., Chkhalo, Nikolay I., Banine, Vadim Y.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2012

Language:

english

File:

PDF, 1.42 MB

english, 2012

2

Current State of Development of a Microscope Operating at a Wavelength of 3.37 nm at the Institute of Physics of Microstructures of the Russian Academy of Sciences

Malyshev, I. V., Pestov, A. E., Polkovnikov, V. N., Salashchenko, N. N., Toropov, M. N., Chkhalo, N. I.

Journal:

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques

Year:

2018

Language:

english

File:

PDF, 1.46 MB

english, 2018

3

Particulars of studying the roughness of substrates for multilayer X-ray optics using small-angle X-ray reflectometry, atomic-force, and interference microscopy

M. M. Barysheva, Yu. A. Vainer, B. A. Gribkov, M. V. Zorina, A. E. Pestov, D. N. Rogachev, N. N. Salashchenko, N. I. Chkhalo

Journal:

Bulletin of the Russian Academy of Sciences: Physics

Year:

2011

Language:

english

File:

PDF, 277 KB

english, 2011

4

Effect of polymer matrix and photoacid generator on the lithographic properties of chemically amplified photoresist

Bulgakova, S. A., Gurova, D. A., Zaitsev, S. D., Kulikov, E. E., Skorokhodov, E. V., Toropov, M. N., Pestov, A. E., Chkhalo, N. I., Salashchenko, N. N.

Journal:

Russian Microelectronics

Year:

2014

Language:

english

File:

PDF, 208 KB

english, 2014

5

The role of ultra-thin carbon barrier layers for fabrication of La/B4C interferential mirrors: Study by time-of-flight secondary ion mass spectrometry and high-resolution transmission electron microscopy

Drozdov, M.N., Drozdov, Y.N., Chkhalo, N.I., Polkovnikov, V.N., Salashchenko, N.N., Yunin, P.A., Roddatis, V.V., Tolstogouzov, A.

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 2.93 MB

english, 2015

6

Source for extreme ultraviolet lithography based on plasma sustained by millimeter-wave gyrotron radiation

Chkhalo, Nikolay I., Golubev, Sergei V., Mansfeld, Dmitry, Salashchenko, Nikolay N., Sjmaenok, Leonid A., Vodopyanov, Alexander V.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2012

Language:

english

File:

PDF, 1.77 MB

english, 2012

7

Free-standing spectral purity filters for extreme ultraviolet lithography

Chkhalo, Nikolay I., Drozdov, Mikhail N., Kluenkov, Evgeny B., Lopatin, Aleksei Ya., Luchin, Valerii I., Salashchenko, Nikolay N., Tsybin, Nikolay N., Sjmaenok, Leonid A., Banine, Vadim E., Yakunin, A

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2012

Language:

english

File:

PDF, 1.70 MB

english, 2012

8

Note: A stand on the basis of atomic force microscope to study substrates for imaging optics

Chkhalo, N. I., Salashchenko, N. N., Zorina, M. V.

Journal:

Review of Scientific Instruments

Year:

2015

Language:

english

File:

PDF, 3.91 MB

english, 2015

9

Sub-micrometer resolution proximity X-ray microscope with digital image registration

Chkhalo, N. I., Pestov, A. E., Salashchenko, N. N., Sherbakov, A. V., Skorokhodov, E. V., Svechnikov, M. V.

Journal:

Review of Scientific Instruments

Year:

2015

Language:

english

File:

PDF, 5.98 MB

english, 2015

10

SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Capabilities of microinterferometer with digital recording of images for studying micro-objects with sub-nanometer resolution

Chkhalo, Nikolay I., Raskin, Denis G., Salashchenko, Nikolay N., Valiev, Kamil A., Orlikovsky, Alexander A.

Year:

2012

Language:

english

File:

PDF, 217 KB

english, 2012

11

SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - A plane wave diffraction on a pin-hole in a film with a finite thickness and real electrodynamic properties

Chkhalo, Nikolay I., Dorofeev, Illarion A., Salashchenko, Nikolay N., Toropov, Mikhail N., Valiev, Kamil A., Orlikovsky, Alexander A.

Year:

2012

Language:

english

File:

PDF, 194 KB

english, 2012

12

SPIE Proceedings [SPIE The International Conference on Micro- and Nano-Electronics 2016 - Zvenigorod, Russian Federation (Monday 3 October 2016)] International Conference on Micro- and Nano-Electronics 2016 - Problems and prospects of maskless (B)EUV lithography

Lukichev, Vladimir F., Rudenko, Konstantin V., Chkhalo, N. I., Polkovnikov, V. N., Salashchenko, N. N., Toropov, M. N.

Year:

2016

Language:

english

File:

PDF, 449 KB

english, 2016

13

Be/Al-based multilayer mirrors with improved reflection and spectral selectivity for solar astronomy above 17 nm wavelength

Chkhalo, N.I., Pariev, D.E., Polkovnikov, V.N., Salashchenko, N.N., Shaposhnikov, R.A., Stroulea, I.L., Svechnikov, M.V., Vainer, Yu.A., Zuev, S.Yu.

Journal:

Thin Solid Films

Year:

2017

Language:

english

File:

PDF, 1.22 MB

english, 2017

14

Study of heat induced changes in elastic properties of multilayer Mo/ZrSi 2 membranes

Chkhalo, N.I., Kluenkov, E.B., Lopatin, A.Ya., Luchin, V.I., Salashchenko, N.N., Sjmaenok, L.A., Tsybin, N.N.

Journal:

Thin Solid Films

Year:

2017

Language:

english

File:

PDF, 1.18 MB

english, 2017

15

Deposition of Mo/Si multilayers onto MEMS micromirrors and its utilization for extreme ultraviolet maskless lithography

Chkhalo, Nikolay, Polkovnikov, Vladimir, Salashchenko, Nikolay, Toropov, Mikhail

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2017

Language:

english

File:

PDF, 989 KB

english, 2017

16

Time-of-flight secondary ion mass spectrometry study on Be/Al-based multilayer interferential structures

Drozdov, M.N., Drozdov, Y.N., Chkhalo, N.I., Polkovnikov, V.N., Yunin, P.A., Chirkin, M.V., Gololobov, G.P., Suvorov, D.V., Fu, D.J., Pelenovich, V., Tolstogouzov, A.

Journal:

Thin Solid Films

Year:

2018

Language:

english

File:

PDF, 1.96 MB

english, 2018

17

Maskless X-Ray Lithography Based on Microoptical Electromechanical Systems and Microfocus X-Ray Tubes

Salashchenko, N. N., Chkhalo, N. I., Dyuzhev, N. A.

Journal:

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques

Year:

2018

Language:

english

File:

PDF, 662 KB

english, 2018

18

Development of Technological Principles for Creating a System of Microfocus X-Ray Tubes Based on Silicon Field Emission Nanocathodes

Djuzhev, N. A., Demin, G. D., Filippov, N. A., Evsikov, I. D., Glagolev, P. Yu., Makhiboroda, M. A., Chkhalo, N. I., Salashchenko, N. N., Filippov, S. V., Kolosko, A. G., Popov, E. O., Bespalov, V. A.

Journal:

Technical Physics

Year:

2019

Language:

english

File:

PDF, 1.47 MB

english, 2019

19

Beryllium-Based Multilayer Mirrors for the Soft X-Ray and Extreme Ultraviolet Wavelength Ranges

Vainer, Yu. A., Garakhin, S. A., Zuev, S. Yu., Nechay, A. N., Pleshkov, R. S., Polkovnikov, V. N., Salashchenko, N. N., Svechnikov, M. V., Sertsu, M. G., Smertin, R. M., Sokolov, A., Chkhalo, N. I., S

Journal:

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques

Year:

2020

File:

PDF, 1.39 MB

2020

20

Beryllium-based multilayer X-ray optics

Polkovnikov, V N, Salashchenko, N N, Svechnikov, M V, Chkhalo, N I

Journal:

Physics Uspekhi

Year:

2020

File:

PDF, 1.02 MB

2020

21

Features of multilayer mirror application for focusing and collimating X-rays from inverse Compton scattering sources

Barysheva, M M, Malyshev, I V, Polkovnikov, V N, Salashchenko, N N, Svechnikov, M V, Chkhalo, N I

Journal:

Quantum Electronics

Year:

2020

File:

PDF, 940 KB

2020

22

Modification and Polishing of the Holographic Diffraction Grating Grooves by a Neutralized Ar Ion Beam

Garakhin, S. A., Zorina, M. V., Zuev, S. Yu., Mikhailenko, M. S., Pestov, A. E., Pleshkov, R. S., Polkovnikov, V. N., Salashchenko, N. N., Chkhalo, N. I.

Journal:

Technical Physics

Year:

2020

File:

PDF, 1005 KB

2020

23

Multilayer TiBe interference structures for ultrasoft X-ray radiation prepared by pulsed laser sputtering

E.P. Kruglyakov, M.V. Fedorchenko, A.L. Fedorov, N.I. Chkhalo

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

1991

Language:

english

File:

PDF, 125 KB

english, 1991

24

Fabrication and performance characteristics of a NiC multilayer grating for hard X-rays

V.A. Chernov, N.I. Chkhalo, N.V. Kovalenko, S.V. Mytnichenko

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

1995

Language:

english

File:

PDF, 301 KB

english, 1995

25

Al/Al2O3: new type of mirrors for intense synchrotron radiation beams

N.I. Chkhalo, M.V. Fedorchenko, A.V. Zarodyshev, V.A. Chernov, V.I. Kirillov, A.A. Nikiforov

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

1995

Language:

english

File:

PDF, 330 KB

english, 1995

26

Ultra-short period X-ray mirrors: Production and investigation

M.S. Bibishkin, N.I. Chkhalo, A.A. Fraerman, A.E. Pestov, K.A. Prokhorov, N.N. Salashchenko, Yu.A. Vainer

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2005

Language:

english

File:

PDF, 244 KB

english, 2005

27

Manufacturing of XEUV mirrors with a sub-nanometer surface shape accuracy

N.I. Chkhalo, E.B. Kluenkov, A.E. Pestov, V.N. Polkovnikov, D.G. Raskin, N.N. Salashchenko, L.A. Suslov, M.N. Toropov

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2009

Language:

english

File:

PDF, 241 KB

english, 2009

28

Method for manufacturing of double-bent X-ray optics

A.D Akhsakhalyan, N.I Chkhalo, A.I Kharitonov

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2001

Language:

english

File:

PDF, 134 KB

english, 2001

29

Reflectometer for precision tests of optical components in the ultrasoft X-ray range

N.I. Chkhalo, A.N. Kirpotin, E.P. Kruglyakov, E.P. Semenov

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

1998

Language:

english

File:

PDF, 297 KB

english, 1998

30

X-ray performance of multilayer gratings: recent advances at SSRC

V.A. Chernov, V.I. Erofeev, N.I. Chkhalo, N.V. Kovalenko, S.V. Mytnichenko

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

1998

Language:

english

File:

PDF, 995 KB

english, 1998

31

High-resolution X-ray study of specular and diffuse scattering from Ni/C multilayer upon annealing

V.A Chernov, E.D Chkhalo, N.V Kovalenko, S.V Mytnichenko

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2000

Language:

english

File:

PDF, 193 KB

english, 2000

32

Synthetic analogs of xanthocercin

V. M. Otsalyuk, T. M. Tkachuk, S. P. Bondarenko, V. V. Chkhalo, V. P. Khilya

Journal:

Chemistry of Natural Compounds

Year:

1998

Language:

english

File:

PDF, 326 KB

english, 1998

33

Thermal loads of X-ray tubes with a fixed anode under long-duration exposure

E. L. Pankratov, N. I. Chkhalo

Journal:

High Temperature

Year:

2006

Language:

english

File:

PDF, 1.53 MB

english, 2006

34

Simulation of the intensity of X-ray tube radiation in soft X-ray and extreme UV regions

A. E. Pestov, N. N. Salashchenko, N. I. Chkhalo

Journal:

Bulletin of the Russian Academy of Sciences: Physics

Year:

2008

Language:

english

File:

PDF, 147 KB

english, 2008

35

A spherical-wave source based on a probe for a near-field microscope

A. Yu. Klimov, V. V. Rogov, N. N. Salashchenko, N. I. Chkhalo

Journal:

Bulletin of the Russian Academy of Sciences: Physics

Year:

2008

Language:

english

File:

PDF, 168 KB

english, 2008

36

Shape correction of optical surfaces with subnanometer precision: Problems, status, and prospects

E. B. Klyuenkov, V. N. Polkovnikov, N. N. Salashchenko, N. I. Chkhalo

Journal:

Bulletin of the Russian Academy of Sciences: Physics

Year:

2008

Language:

english

File:

PDF, 140 KB

english, 2008

37

The application of the X-ray standing wave method to study NiC layered structures obtained by laser-assisted deposition

V.A. Chernov, N.I. Chkhalo, I.P. Dolbnya, K.V. Zolotarev

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

1995

Language:

english

File:

PDF, 260 KB

english, 1995

38

Status of X-ray mirror optics at the Siberian SR Centre

N.I. Chkhalo, M.V. Fedorchenko, N.V. Kovalenko, E.P. Kruglyakov, A.I. Volokhov, V.A. Chernov, S.V. Mytnichenko

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

1995

Language:

english

File:

PDF, 560 KB

english, 1995

39

The station for detector calibration in the soft X-ray range at the VEPP-2M storage ring

N.I Chkhalo, A.V Evstigneev, M.A Kholopov, V.V Lyakh, A.D Nikolenko, V.F Pindyurin, A.N Subbotin

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

1995

Language:

english

File:

PDF, 456 KB

english, 1995

40

Application of free-standing multilayer films as polarizers for X-ray radiation

S.S. Andreev, M.S. Bibishkin, N.I. Chkhalo, A.Ya. Lopatin, V.I. Luchin, A.E. Pestov, K.A. Prokhorov, N.N. Salaschchenko

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2005

Language:

english

File:

PDF, 232 KB

english, 2005

41

Projection XEUV-nanolithography

N.I. Chkhalo, N.N. Salashchenko

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2009

Language:

english

File:

PDF, 216 KB

english, 2009

42

Multilayered mirrors based on La/B4C(B9C) for X-ray range near anomalous dispersion of boron (λ≈6.7 nm)

S.S. Andreev, M.M. Barysheva, N.I. Chkhalo, S.A. Gusev, A.E. Pestov, V.N Polkovnikov, N.N. Salashchenko, L.A. Shmaenok, Yu.A. Vainer, S.Yu. Zuev

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2009

Language:

english

File:

PDF, 282 KB

english, 2009

43

X-ray and vacuum-ultraviolet plasma spectroscopy with the use of new focusing multilayer structures

Yu. É. Borozdin, E. D. Kazakov, V. I. Luchin, N. N. Salashchenko, I. Yu. Tolstikhina, V. V. Chernov, N. I. Chkhalo, A. P. Shevel’ko, O. F. Yakushev

Journal:

Year:

2008

Language:

english

File:

PDF, 205 KB

english, 2008

44

Extreme-ultraviolet source based on the electron-cyclotron-resonance discharge

A. V. Vodopyanov, S. V. Golubev, D. A. Mansfeld, A. G. Nikolaev, K. P. Savkin, N. N. Salashchenko, N. I. Chkhalo, G. Yu. Yushkov

Journal:

Year:

2008

Language:

english

File:

PDF, 169 KB

english, 2008

45

Shortwave projection nanolithography

N. N. Salashchenko, N. I. Chkhalo

Journal:

Herald of the Russian Academy of Sciences

Year:

2008

Language:

english

File:

PDF, 262 KB

english, 2008

46

Effect of pinhole roughness on light diffraction

N. N. Salashchenko, M. N. Toropov, N. I. Chkhalo

Journal:

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques

Year:

2008

Language:

english

File:

PDF, 194 KB

english, 2008

47

Details of how to mount high-precision optics

N. N. Salashchenko, M. N. Toropov, N. I. Chkhalo

Journal:

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques

Year:

2010

Language:

english

File:

PDF, 1.37 MB

english, 2010

48

Use of cluster secondary ions for minimization of matrix effects in the SIMS depth profiling of La/B4C multilayer nanostructures

M. N. Drozdov, Yu. N. Drozdov, M. M. Barysheva, V. N. Polkovnikov, N. I. Chkhalo

Journal:

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques

Year:

2010

Language:

english

File:

PDF, 307 KB

english, 2010

49

System for illumination of an EUV-nanolithograph mask

S. Yu. Zuev, A. E. Pestov, V. N. Polkovnikov, N. N. Salashchenko, A. S. Skryl’, I. L. Strulya, M. N. Toropov, N. I. Chkhalo

Journal:

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques

Year:

2011

Language:

english

File:

PDF, 446 KB

english, 2011

50

Design of the aspheric Schwarzschild lens for a nanolithographer with the operating wavelength λ = 13.5 nm

N. N. Salashchenko, A. S. Skryl’, M. N. Toropko, N. I. Chkhalo

Journal:

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques

Year:

2011

Language:

english

File:

PDF, 197 KB

english, 2011

To build up a library is to create a life. It’s never just a random collection of books.

— Carlos María Domínguez

Official channel

Z-Library Desktop Launcher

Z-Library Since 2009 support@z-lib.do

EnglishРусскийEspañolItalianoελληνικάاللغة العربيةBahasa IndonesiaBahasa Malaysiaहिन्दीDeutschFrançaisPortuguêsУкраїнськаPolski中文繁體中文日本語Tiếng ViệtAzərbaycan DiliՀայոց լեզուภาษาไทยTürk Diliქართველიবাংলাپښتوతెలుగుاردو한국어SrpskiБългарски